- ORCID iD
- 0000-0002-7651-9461
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- Journal Article
- open access
Floating potential probes for process control during reactive magnetron sputtering
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- Journal Article
- A1
- open access
Influence of chemisorption on the double hysteresis phenomenon during reactive sputtering
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- Journal Article
- A1
- open access
A computational study of the double hysteresis phenomenon during reactive sputtering
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Nitride formation during reactive sputter deposition of multi-principal element alloys in argon/nitrogen mixtures
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Sputter yield measurements to evaluate the target state during reactive magnetron sputtering
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- Journal Article
- A1
- open access
Modeling reactive magnetron sputtering : opportunities and challenges
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- Conference Paper
- C3
- open access
The (in)stability of process control mechanisms in reactive DC sputtering deposition
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Tutorial: Hysteresis during the reactive magnetron sputtering process
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An X-ray photoelectron spectroscopy study of the target surface composition after reactive magnetron sputtering
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Anomalous effects in the aluminum oxide sputtering yield