dr. Felix Mattelaer
No current affiliation with UGent
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Surface reactions between LiHMDS, TMA and TMP leading to deposition of amorphous lithium phosphate
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- Journal Article
- A1
- open access
Plasma enhanced atomic layer deposition of a (nitrogen doped) Ti phosphate coating for improved energy storage in Li-ion batteries
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- Journal Article
- A1
- open access
A liquid alkoxide precursor for the atomic layer deposition of aluminum oxide films
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Atomic layer deposition of localized boron- and hydrogen-doped aluminum oxide using trimethyl borate as a dopant precursor
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- Conference Paper
- C3
- open access
Nitrogen doping of Al- and Ti-phosphate through plasma-enhanced ALD
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- Journal Article
- A1
- open access
Atomic layer deposition of nitrogen-doped Al phosphate coatings for Li-ion battery applications
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- Conference Paper
- C3
- open access
Design of Li-containing layers with LiHMDS
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- Journal Article
- A1
- open access
Reaction pathways for atomic layer deposition with lithium hexamethyl disilazide, trimethyl phosphate, and oxygen plasma
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- Journal Article
- A1
- open access
A secondary reaction pathway for the alumina atomic layer deposition process with trimethylaluminum and water, revealed by full-range, time-resolved in situ mass spectrometry
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- Conference Paper
- C3
- open access
Photocatalytic lithography with atomic layer deposited TiO2 films to tailor biointerface properties