ir. Delphine Longrie
No current affiliation with UGent
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- Conference Paper
- C3
- open access
Plasma-enhanced ALD on particles and powders
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- Conference Paper
- C3
- open access
Thermal and plasma enhanced atomic layer deposition on powders and particles
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Plasma enhanced atomic layer deposition on powders
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Thermal and plasma-enhanced atomic layer deposition of TiN using TDMAT and NH3 on particles agitated in a rotary reactor
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- Conference Paper
- C3
- open access
Conformal nanocoatings for surface engineering of particles by thermal and plasma-enhanced atomic layer deposition using a rotary reactor
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Reactor concepts for atomic layer deposition on agitated particles: a review
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Atomic layer deposition for surface engineering of powders
(2013) -
- Conference Paper
- C3
- open access
Thermal and plasma-enhanced ALD of TiN on powders using a rotary reactor
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- Conference Paper
- C1
- open access
A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects
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A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects
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- Conference Paper
- C3
- open access
A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects
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- Conference Paper
- C3
- open access
Comparison of three processes for plasma-enhanced ALD of platinum
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Plasma-enhanced ALD of platinum with O₂, N₂ and NH₃ plasmas
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Texture of atomic layer deposited ruthenium