Li'ao Cao 1 – 4 of 4 publications Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Filter publications Download search results Subscribe to news feed Add to list PhD Thesis Atomic layer deposition of aluminum oxide using alkoxide precursors Li'ao Cao (UGent) (2024) Add to list Journal Article A1 open access A liquid alkoxide precursor for the atomic layer deposition of aluminum oxide films Li'ao Cao (UGent) , Felix Mattelaer (UGent) , Timo Sajavaara, Jolien Dendooven (UGent) and Christophe Detavernier (UGent) (2020) JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A. 38(2). Add to list Journal Article A1 Aluminum tri-isopropoxide as an alternative precursor for atomic layer deposition of aluminum oxide thin films Fatemeh SM Hashemi, Li'ao Cao (UGent) , Felix Mattelaer (UGent) , Timo Sajavaara, J Ruud van Ommen and Christophe Detavernier (UGent) (2019) JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A. 37(4). Add to list Journal Article A1 Atomic layer deposition of Al2O3 using aluminum triisopropoxide (ATIP) : a combined experimental and theoretical study Ba Tai Truong (UGent) , Li'ao Cao (UGent) , Felix Mattelaer (UGent) , Geert Rampelberg (UGent) , Fatemeh SM Hashemi, Jolien Dendooven (UGent) , J Ruud van Ommen, Christophe Detavernier (UGent) and Marie-Françoise Reyniers (UGent) (2019) JOURNAL OF PHYSICAL CHEMISTRY C. 123(1). p.485-494
