Academic Bibliography

Search 200 years of publications by Ghent University researchers.

Jakob Kuhs

Faculty of Sciences > Department of Solid state sciences

Work address: Krijgslaan 281, S1
9000 Gent
Email: Jakob.Kuhs@UGent.be

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Mark
- conference
- C3
Plasma enhanced atomic layer deposition of aluminium sulphide

Jakob Kuhs (UGent) , Zeger Hens (UGent) and Christophe Detavernier (UGent)

(2017) EuroCVD-21 - Baltic ALD-15, Joint meeting, Abstracts.
Mark
- conference
- C3
Plasma enhanced atomic layer deposition of aluminium sulphide

Jakob Kuhs (UGent) , Zeger Hens (UGent) and Christophe Detavernier (UGent)

(2017) Atomic Layer Deposition, 17th International conference, Abstracts.
Mark
- journalArticle
- A1
- open access
Plasma enhanced atomic layer deposition of zinc sulfide thin films

Jakob Kuhs (UGent) , Thomas Dobbelaere (UGent) , Zeger Hens (UGent) and Christophe Detavernier (UGent)

(2017) JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A. 35(1).
Mark
- conference
- C3
Thin, low roughness Ru films deposited by thermal and plasma enhanced atomic layer deposition using RuO4 and H2 at low temperatures

Matthias Minjauw (UGent) , Jolien Dendooven (UGent) , Boris Capon (UGent) , Christian Dussarat, Eduardo Solano Minuesa (UGent) , Kilian Devloo-Casier (UGent) , Jakob Kuhs (UGent) , Marc Schaekers, Alessandro Coati and Christophe Detavernier (UGent)

(2016) SR-ALD workshop : 12-15 June 2016, ALBA Synchrotron, Barcelona (Spain).
Mark
- conference
- C3
Thin, low roughness Ru films deposited by thermal and plasma enhanced atomic layer deposition using RuO4 and H2 at low temperatures

Matthias Minjauw (UGent) , Jolien Dendooven (UGent) , Boris Capon (UGent) , Christian Dussarat, Eduardo Solano Minuesa (UGent) , Kilian Devloo-Casier (UGent) , Jakob Kuhs (UGent) , Marc Schaekers, Alessandro Coati and Christophe Detavernier (UGent)

(2016) Belgian Physical Society, General scientific meeting, Abstracts.
Mark
- conference
- C3
Thin, low roughness Ru films deposited by thermal and plasma enhanced atomic layer deposition using RuO4 and H2 at low temperatures

Matthias Minjauw (UGent) , Jolien Dendooven (UGent) , Christian Dussarat, Eduardo Solano Minuesa (UGent) , Kilian Devloo-Casier (UGent) , Jakob Kuhs (UGent) , Marc Schaekers, Alessandro Coati and Christophe Detavernier (UGent)

(2016) Materials for Advanced Metallization, IEEE conference, Abstracts.
Mark
- conference
- C3
Plasma enhanced atomic layer deposition of zinc sulfide

Jakob Kuhs (UGent) , Zeger Hens (UGent) and Christophe Detavernier (UGent)

(2016) Atomic Layer Deposition, 16th International conference, Abstracts.