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Fabrication and characterization of CMOS-compatible integrated tungsten heaters for thermo-optic tuning in silicon photonics devices
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25Gb/s silicon-photonics WDM platform for low-power optical I/O
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- Conference Paper
- C3
- open access
Electronic-photonic integration in the helios project
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- Conference Paper
- C3
- open access
Comparison of heater architecture for thermal control of silicon photonics circuits
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CMOS compatible heater fabrication approaches for thermal tuning of photonics devices
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- Conference Paper
- C1
- open access
CMOS-compatible tungsten heaters for silicon photonic waveguides
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- Conference Paper
- C1
- open access
Optical interconnect technologies based on silicon photonics
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- Conference Paper
- C3
- open access
A silicon photonics platform with heterogeneous III-V integration
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Photonics-CMOS 3D integration: copper through-silicon-via approach