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- Journal Article
- A1
- open access
A 2D MEMS grating based CMOS compatible poly-SiGe variable optical attenuator
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- PhD Thesis
- open access
Diffractive micro-electronical structures in Si and Si Ge
(2013) -
- Journal Article
- A1
- open access
Static and dynamic characterization of pull-in protected CMOS compatible poly-SiGe grating light valves
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- Conference Paper
- P1
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Static and dynamic characterization of poly-SiGe grating light valves
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- Conference Paper
- C3
- open access
Grating light valves
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- Journal Article
- A1
- open access
SiGe based grating light valves: a leap towards monolithic integration of MOEMS
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SiGe MEMS technology: a platform technology enabling different demonstrators
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Grating light valves: a SiGe based approach towards monolithic integration of MOEMS