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Ultra-low copper baths for sub-35 nm copper interconnects
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Electrochemical determination of the cupric ion activity in aqeuous acidic cupric sulfate electrolytes
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Ultra-low copper baths for sub-35 nm copper interconnects
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Ultra-low copper baths for sub-35 nm copper interconnects
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Adsorption/desorption of suppressor complex on copper : description of the critical potential
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Adsorption/desorption of suppressor complex on copper : descrition of the critical potential
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Physicochemical mechanism of Damascene copper plating : effect of suppressor